Like Diederik mentioned, you will first need to ensure the proper program statuses are contained in your channel (within Admin). Once confirmed, you would simply create the "open" and "clicked" smart campaigns that will allow you to filter program members by "opens" and "clicks". Here's an example of a sample program:
Here is the smart list and flow for "01 - Opened":
Here is the smart list and flow for "02 - Clicked":
We don't use the Email Program anymore due to some recent bugs and limitations. For now, we use a standard Marketo Program for our email programs.